✦ LIBER ✦
Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays With Hidden Vertical Comb-Drive Actuators
✍ Scribed by Hah, D.; Huang, S.T.-Y.; Tsai, J.-C.; Toshiyoshi, H.; Wu, M.C.
- Book ID
- 120995607
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 807 KB
- Volume
- 13
- Category
- Article
- ISSN
- 1057-7157
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