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High aspect ratio micromirrors with large static rotation and piston actuation

✍ Scribed by V. Milanovic; Sunghoon Kwon; L.P. Lee

Book ID
119801210
Publisher
IEEE
Year
2004
Tongue
English
Weight
496 KB
Volume
16
Category
Article
ISSN
1041-1135

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This paper presents the design, fabrication and characterization of a piezoelectrically actuated high-fillfactor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during scanning. The piezoelectric material is a sol-gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of