A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift
✍ Scribed by Yiping Zhu; Wenjing Liu; Kemiao Jia; Wenjun Liao; Huikai Xie
- Book ID
- 104092857
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 661 KB
- Volume
- 167
- Category
- Article
- ISSN
- 0924-4247
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✦ Synopsis
This paper presents the design, fabrication and characterization of a piezoelectrically actuated high-fillfactor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during scanning. The piezoelectric material is a sol-gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of 53/47. The small initial tilt and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO 2 multilayers, which are released via undercutting the substrate silicon. The fabricated piezoelectric micromirror can be actuated about two rotational axes in the mirror plane and for translational vertical scan (piston actuation). The resonant frequencies of the piston and rotation modes are 316 Hz and 582 Hz, respectively. At their respective resonant frequencies, the maximum piston magnitude at resonant driving is 32 m, and the two-dimensional rotating scan ranges are about 5 • , both measured at a 2V pp sinusoidal driving voltage.