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A magnetron sputtering system for the preparation of patterned thin films and in situ thin film electrical resistance measurements

โœ Scribed by Arnalds, U. B.; Agustsson, J. S.; Ingason, A. S.; Eriksson, A. K.; Gylfason, K. B.; Gudmundsson, J. T.; Olafsson, S.


Book ID
121507105
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
749 KB
Volume
78
Category
Article
ISSN
0034-6748

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