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The origin of the inhomogeneity of electrical resistivity in magnetron-sputtered indium tin oxide thin films

โœ Scribed by Katsutaro Ichihara; Naoyuki Inoue; Michiko Okubo; Nobuaki Yasuda


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
475 KB
Volume
245
Category
Article
ISSN
0040-6090

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