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Effect of ion bombardment during growth on the electrical resistivity of magnetron-sputtered carbon films

✍ Scribed by I. Petrov; V. Orlinov; I. Ivanov; J. Kourtev; J. Jelev


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
513 KB
Volume
168
Category
Article
ISSN
0040-6090

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