✦ LIBER ✦

A hierarchical pattern representation format for proximity effect correction in E-beam lithography

✍ Scribed by Soo-Young Lee; Jayesh Laddha

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A novel hierarchical approach for proxim

✍ Harafuji, K.; Misaka, A.; Nomura, N.; Kawamoto, M.; Yamashita, H. 📂 Article 📅 1993 🏛 IEEE 🌐 English ⚖ 733 KB

Enhanced proximity-effect correction for

✍ Machida, Y.; Nakayama, N.; Furuya, S.; Yamamoto, S. 📂 Article 📅 1985 🏛 IEEE 🌐 English ⚖ 651 KB

A visualisation and proximity correction

✍ T.A. Fretwell; R. Gurung; P.L. Jones 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 405 KB

Proxy — A new approach for proximity cor

✍ V.V. Aristov; A.I. Erko; B.N. Gaifullin; A.A. Svintsov; S.I. Zaitsev; R.R. Jede; 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 315 KB

Improved CD control and line edge roughn

✍ Jens Bolten; Thorsten Wahlbrink; Namil Koo; Heinrich Kurz; Stefan Stammberger; U 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 414 KB

Automatic determination of spatial dose

✍ Soo-Young Lee; Jayesh Laddha 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 260 KB