✦ LIBER ✦
Automatic determination of spatial dose distribution for improved accuracy in e-beam proximity effect correction
✍ Scribed by Soo-Young Lee; Jayesh Laddha
- Book ID
- 114155311
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 260 KB
- Volume
- 57-58
- Category
- Article
- ISSN
- 0167-9317
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