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A DLTS study of defects formed in silicon during ion beam mixing

✍ Scribed by F.D. Auret; J.B. Malherbe; M. Nel; G. Myburg

Book ID: 113279064
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 391 KB
Volume: 35
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(88)90275-3

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