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A direct measurement of thermal equilibrium defects in hydrogenated amorphous silicon-nitrogen alloy films

✍ Scribed by He, Deyan ;Zhang, Fangqing ;Chen, Guanghua


Book ID
105381912
Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
153 KB
Volume
118
Category
Article
ISSN
0031-8965

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