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Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films

✍ Scribed by J. Kanicki; W.L. Warren; C.H. Seager; M.S. Crowder; P.M. Lenahan

Book ID: 117146991
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 336 KB
Volume: 137-138
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80113-9

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