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A comparison of the mechanical stability of silicon nitride films deposited with various techniques

✍ Scribed by Pierre Morin; Gaetan Raymond; Daniel Benoit; Patrick Maury; Remi Beneyton

Book ID
116245228
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
410 KB
Volume
260
Category
Article
ISSN
0169-4332

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