Anodic oxide films on silicon carbide
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S. K. Lilov
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Article
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2007
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John Wiley and Sons
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English
โ 104 KB
## Abstract Anodic oxide films were grown on SiC using various electrolytes. The obtained oxide films were compared and some of their electrophysical properties were investigated. Anodic oxidation of SiC was shown to be useful for precise removal of layers as well as for identification of the polar