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Doped anodic oxide films obtained on silicon and silicon compounds: Preparation, properties, and application

✍ Scribed by L. P. Mileshko


Book ID
110166642
Publisher
SP MAIK Nauka/Interperiodica
Year
2009
Tongue
English
Weight
180 KB
Volume
45
Category
Article
ISSN
0020-1685

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Anodic oxide films on silicon carbide
✍ S. K. Lilov πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 104 KB

## Abstract Anodic oxide films were grown on SiC using various electrolytes. The obtained oxide films were compared and some of their electrophysical properties were investigated. Anodic oxidation of SiC was shown to be useful for precise removal of layers as well as for identification of the polar