✦ LIBER ✦

Anodic oxide films on silicon carbide

✍ Scribed by S. K. Lilov

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 104 KB
Volume: 42
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.200710977

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✦ Synopsis

Abstract

Anodic oxide films were grown on SiC using various electrolytes. The obtained oxide films were compared and some of their electrophysical properties were investigated. Anodic oxidation of SiC was shown to be useful for precise removal of layers as well as for identification of the polar faces of SiC crystals. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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