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96/06199 Electrical and structural properties of the SI/C interface in poly-Si thin films on graphite substrates


Publisher
Elsevier Science
Year
1996
Weight
202 KB
Volume
37
Category
Article
ISSN
0140-6701

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✦ Synopsis


07 Alternative energy sources (solar energy) 96/06191


πŸ“œ SIMILAR VOLUMES


Influence of composition and structural
✍ D. Munteanu; C. Ionescu; C. Olteanu; A. Munteanu; F. Davin; L. Cunha; C. Moura; πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 636 KB

Within the frame of this work, low temperature Ti-Si-C films were deposited on high-speed steel and stainless steel substrates by combined dc/rf magnetron co-sputtering. Composition analysis revealed the existence of two distinct regions: (i) a silicon doped sub-stoichiometric titanium carbide zone