Interface Controlled Materials (RUEHLE:INTERFACE CONT.MAT O-BK) || Influence of Growth Parameters on the Electrical and Optical Properties of Ge x Si y O z Sputtered Thin Films

✍ Scribed by Rühle, M.; Gleiter, H.

• Publisher: Wiley-VCH Verlag GmbH & Co. KGaA
• Year: 2005
• Weight: 121 KB
• Category: Article
• ISBN: 352760622X
• DOI: 10.1002/352760622x.ch13