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4H-SiC Homoepitaxial Growth on Substrates with Different Off-Cut Directions

✍ Scribed by Kallinger, Birgit; Thomas, Bernd; Berwian, Patrick; Friedrich, Jochen; Trachta, Gerd; Weber, Arnd Dietrich

Book ID: 121219143
Publisher: Trans Tech Publications, Ltd.
Year: 2011
Tongue: English
Weight: 437 KB
Volume: 679-680
Category: Article
ISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.679-680.55

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