✦ LIBER ✦
Growth of smooth 4H-SiC epilayers on 4° off-axis substrates with chloride-based CVD at very high growth rate
✍ Scribed by S. Leone; F.C. Beyer; H. Pedersen; O. Kordina; A. Henry; E. Janzén
- Book ID
- 113787329
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 694 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0025-5408
No coin nor oath required. For personal study only.