✦ LIBER ✦

4119. Control of pattern dimensions in electron lithography. (USA)

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A theoretical estimate of the voltage de

✍ Nomura, E. ;Murata, K. ;Nagami, K. 📂 Article 📅 1981 🏛 John Wiley and Sons 🌐 English ⚖ 517 KB

Application of electron beam lithography

✍ W. Parkes; S. Thoms; C.D.W. Wilkinson 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 394 KB

Fabrication of quantum wires on GaAs sub

✍ M López; N Tanaka; I Matsuyama; T Ishikawa 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 390 KB

High robustness of correlation-based ali

✍ K.E. Docherty; K.A. Lister; J. Romijn; J.M.R. Weaver 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 359 KB

Estimation of resist profile for line/sp

✍ Q. Dai; S.-Y. Lee; S.H. Lee; B.-G. Kim; H.-K. Cho 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 661 KB

Climatic and topographic controls on pat

✍ William T. Flatley; Charles W. Lafon; Henri D. Grissino-Mayer 📂 Article 📅 2010 🏛 Springer 🌐 English ⚖ 828 KB