✦ LIBER ✦
Application of electron beam lithography to pattern sub-micron features in a beam forming grating
✍ Scribed by W. Parkes; S. Thoms; C.D.W. Wilkinson
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 394 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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