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3919. AES and XPS of silicon nitride films of varying refractive indices. (USA)

Book ID: 104265015
Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 107 KB
Volume: 29
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(79)80807-6

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