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Laser coupling: A new technique for measurement of refractive index and thickness of oxide and nitride films on silicon

โœ Scribed by Schinke, D.; Smith, R.; Karr, M.; Mackenzie, D.


Book ID
119794011
Publisher
IEEE
Year
1977
Tongue
English
Weight
712 KB
Volume
13
Category
Article
ISSN
0018-9197

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The phase difference between s-and p-polarizations of a circularly polarized heterodyne light beam reflected from a transparent plate is measured. The measured data is substituted into the specially derived equations and the refractive index can be calculated. Next, the variations of phase differenc