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1.54 μm room-temperature luminescence of MeV erbium-implanted silica glass

✍ Scribed by Polman, A.; Lidgard, A.; Jacobson, D. C.; Becker, P. C.; Kistler, R. C.; Blonder, G. E.; Poate, J. M.


Book ID
125861684
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
510 KB
Volume
57
Category
Article
ISSN
0003-6951

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1.54 μm photoluminescence of erbium-impl
✍ D. Moutonnet; H. L'Haridon; P.N. Favennec; M. Salvi; M. Gauneau; F. Arnaud D'Avi 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 190 KB

Erbium-implanted silicon layers have been studied both by secondary ion mass spectrometry tSIMS) and by photoluminescence (PL). 7he SIMS analysis shows the erbium redistribution inside the substrate following the rapid thermal annealing and the implantation energy. The PL .spectra present a maximum