Zirconocene Alkoxides, Promising Precursors for MOCVD of Zirconium Dioxide Thin Films

✍ Scribed by Andrea Sartori; Naida El Habra; Chiara De Zorzi; Sergio Sitran; Maurizio Casarin; Gianni Cavinato; Cinzia Sada; Rosalba Gerbasi; Gilberto Rossetto

• Book ID: 112071803
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 364 KB
• Volume: 18
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.201106950