Device-quahty ZnO thm film IS deposlted by usmg an mdlgenously developed moddied CVD method and a Pd/ZnO/p-B heteropmctlon IS fabricated A study of the current-voltage characterlstlcs of the heterolunctlon m pure air and m air with different concentrations (2000-20 000 ppm) of hydrogen reveals that
Zinc oxide thin film gas sensor for detection of acetone
β Scribed by P. P. Sahay
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 585 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0022-2461
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Polycrystalline zinc oxide thin films with thicknesses in the range 0.3 ~m-1 #m were deposited on silicon and alumina substrates by a spray chemical vapour deposition method. The film was characterized for crystallinity, resistivity and carrier concentration. A modified heterostructure Pd/ZnO(0.38 ~
This paper presents some recent data about the sensitivity of a thin tin oxide layer exposed to different atmospheres. Particular emphasis is given to the behaviour in the presence of mixtures of two reducing gases, with some attempt to explain, at least tentatively, the observed changes of resistiv