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Zinc oxide by ALD for thin-film-transistor application

โœ Scribed by Woon-Seop Choi

Book ID
117970345
Publisher
Society for Information Display
Year
2009
Tongue
English
Weight
504 KB
Volume
17
Category
Article
ISSN
1071-0922

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## Abstract Stretchable and transparent thin film transistors (TFTs) with intrisically brittle oxide semiconductors are built using a wavy structural configuration that can provide high flexibility and stretchability. After device fabrication procedures including high temperature annealing, the oxi