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Young's modulus of electroplated Ni thin film for MEMS applications

✍ Scribed by J.K. Luo; A.J. Flewitt; S.M. Spearing; N.A. Fleck; W.I. Milne

Book ID: 116730401
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 184 KB
Volume: 58
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2004.02.044

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