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Biaxial Young’s modulus of silicon carbide thin films

✍ Scribed by Jean, A.; El Khakani, M. A.; Chaker, M.; Boily, S.; Gat, E.; Kieffer, J. C.; Pepin, H.; Ravet, M. F.; Rousseaux, F.


Book ID
118056584
Publisher
American Institute of Physics
Year
1993
Tongue
English
Weight
670 KB
Volume
62
Category
Article
ISSN
0003-6951

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