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Estimating the In-Plane Young's Modulus of Polycrystalline Films in MEMS

✍ Scribed by Cantwell, P. R.; Kim, H.; Schneider, M. M.; Hsu, H.-H.; Peroulis, D.; Stach, E. A.; Strachan, A.

Book ID: 117880973
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 754 KB
Volume: 21
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2012.2191939

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