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Estimating the In-Plane Young's Modulus of Polycrystalline Films in MEMS

โœ Scribed by Cantwell, P. R.; Kim, H.; Schneider, M. M.; Hsu, H.-H.; Peroulis, D.; Stach, E. A.; Strachan, A.


Book ID
117880973
Publisher
IEEE
Year
2012
Tongue
English
Weight
754 KB
Volume
21
Category
Article
ISSN
1057-7157

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In this study, a fundamental measurement of the Young's modulus of Epoclad and Epocore negative photo resist is performed, using a miniature tensile test setup. The experiments were done on miniature dog bone tensile test structures which are fabricated using normal micro machining methods. In addit