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Young's modulus characterization of low- k films of nanoporous Black Diamond™ by surface acoustic waves

✍ Scribed by Xingmeng, Shan; Xia, Xiao; Yaliang, Liu

Book ID: 125524634
Publisher: IOP Publishing
Year: 2010
Tongue: English
Weight: 413 KB
Volume: 31
Category: Article
ISSN: 1674-4926
DOI: 10.1088/1674-4926/31/8/082002

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