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Determination of Young’s Modulus of Porous Low-k Films by Ellipsometric Porosimetry

✍ Scribed by Mogilnikov, K. P.; Baklanov, M. R.


Book ID
118275018
Publisher
The Electrochemical Society
Year
2002
Tongue
English
Weight
112 KB
Volume
5
Category
Article
ISSN
1099-0062

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