Mechanical properties of periodic porous silica low-k films determined by the twin-transducer surface acoustic wave technique

✍ Scribed by X. Xiao; N. Hata; K. Yamada; T. Kikkawa

• Book ID: 121677484
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 311 KB
• Volume: 74
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1611615