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Nondestructive determination of interfacial adhesion property of low-k/Si by the surface acoustic waves

✍ Scribed by X. Xiao; Y. Sun; X.-M. Shan

Book ID: 119374157
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 729 KB
Volume: 207
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2012.06.077

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