✦ LIBER ✦
Numerical study on surface acoustic wave method for determining Young's modulus of low-k films involved in multi-layered structures
✍ Scribed by Xia Xiao; Xueyi You
- Book ID
- 108060046
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 354 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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