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XPS study of N2 annealing effect on thermal Ta2O5 layers on Si

✍ Scribed by E Atanassova; G Tyuliev; A Paskaleva; D Spassov; K Kostov


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
414 KB
Volume
225
Category
Article
ISSN
0169-4332

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