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X-ray reflectivity study of bias graded diamond like carbon film synthesized by ECR plasma

✍ Scribed by R M DEY, S K DESHPANDE, S B SINGH, N CHAND, D S PATIL…


Book ID
120899897
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
448 KB
Volume
36
Category
Article
ISSN
0250-4707

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X: Diamond like carbon X-ray reflectivity Diamond like carbon (DLC) films were deposited at room temperature on Si (111) substrates by microwave electron cyclotron resonance (ECR) plasma chemical vapor deposition (CVD) process using plasma of methane diluted with argon gas. During deposition, dc sel