✦ LIBER ✦
X-ray reflectivity analysis on initial stage of diamond-like carbon film deposition on Si substrate by RF plasma CVD and on removal of the sub-surface layer by oxygen plasma etching
✍ Scribed by Harigai, Toru; Yasuoka, Yuki; Nitta, Noriko; Furuta, Hiroshi; Hatta, Akimitsu
- Book ID
- 121478552
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 563 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0925-9635
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