Shrinking feature sizes in semiconductor device production as well as the use of new materials demand innovation in device technology and material analysis. X-ray spectrometers based on superconducting sensor technology are currently closing the gap between fast energy dispersive spectroscopy (EDS)
X-ray microanalysis with microcalorimeters
✍ Scribed by C. Isaila; F.v. Feilitzsch; J. Höhne; C. Hollerith; K. Phelan; B. Simmnacher; R. Weiland; D. Wernicke
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 141 KB
- Volume
- 559
- Category
- Article
- ISSN
- 0168-9002
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