Shrinking feature sizes in semiconductor device production as well as the use of new materials demand innovation in device technology and material analysis. X-ray spectrometers based on superconducting sensor technology are currently closing the gap between fast energy dispersive spectroscopy (EDS)
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Energy scales in X-ray microcalorimeters
β Scribed by Tillotson, W.A; Boyce, K.R; Brown, G.V; Cottam, J; Figueroa-Feliciano, E; Kelley, R.L; Porter, F.S; Stahle, C.K
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 363 KB
- Volume
- 520
- Category
- Article
- ISSN
- 0168-9002
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