Energy dispersive X-ray spectroscopy with microcalorimeters

✍ Scribed by Hollerith, C.; Wernicke, D.; Bühler, M.; Feilitzsch, F.v.; Huber, M.; Höhne, J.; Hertrich, T.; Jochum, J.; Phelan, K.; Stark, M.; Simmnacher, B.; Weiland, W.; Westphal, W.

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 317 KB
• Volume: 520
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2003.11.327

✦ Synopsis

Shrinking feature sizes in semiconductor device production as well as the use of new materials demand innovation in device technology and material analysis. X-ray spectrometers based on superconducting sensor technology are currently closing the gap between fast energy dispersive spectroscopy (EDS) and high-resolution wavelength dispersive spectroscopy (WDS). This work reports on the successful integration of iridium/gold transition edge sensors in the first industrially used microcalorimeter EDS. The POLARIS microcalorimeter system is installed at the failure analysis lab FA5 at Infineon Technologies AG in Neuperlach (Munich) and is used in routine analysis.