First Use of NTD Germanium-Based Microcalorimeters For High-Resolution, Broadband X-Ray Microanalysis

✍ Scribed by Eric Silver; Mark LeGros; Gerry Austin; Norm Madden; Jeffrey Beeman; Eugene Haler

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 379 KB
• Volume: 26
• Category: Article
• ISSN: 0049-8246
• DOI: 10.1002/(sici)1097-4539(199709)26:5<265::aid-xrs204>3.0.co;2-w

✦ Synopsis

Broadband, high-resolution x-ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium-based microcalorimeter. An energy resolution of 8 eV was used to resolve completely the silicon Ka from the tungsten Ma x-rays. This performance will make it possible to analyze efficiently the composition of thin Ðlms and surface contaminants by using low electron excitation energies.