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X-ray diffraction study of defect distribution in Czochralski grown silicon highly doped by As

✍ Scribed by Kyutt, R N; Shulpina, I L; Mosina, G N; Ratnikov, V V; Sorokin, L M; Scheglov, M P; Ruvimov, S S; Kearns, J; Todt, V

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