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X-ray assisted nitridation of silicon surface at ambient temperature

✍ Scribed by B. Lai; R. Nachman; A.K. Ray-Chaudhuri; F. Cerrina

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 411 KB
Volume: 71
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(89)90073-2

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