X-Ray assisted nitridation of silicon surface at ambient temperature : B. Lai, R. Nachman, A. K. Ray-Chaudhuri and F. Cerrina. Solid-St. Commun.71(9), 721 (1989)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 132 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90233-d