✦ LIBER ✦
Oxidation of etched silicon in air at room temperature; measurements with ultrasoft x-ray photoelectron spectroscopy (ESCA) and neutron activation analysis
✍ Scribed by G. Mende; J. Finster; D. Flamm; D. Schulze
- Publisher
- Elsevier Science
- Year
- 1983
- Weight
- 60 KB
- Volume
- 128
- Category
- Article
- ISSN
- 0167-2584
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