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X-ray and electron microscopy studies of arsenium implanted silicon crystals after a pulsed laser annealing

✍ Scribed by Dr. B. Bryza; Prof. Dr. J. Auleytner; Dr. H. Bartsch; Dr. K. Wieteska

Publisher: John Wiley and Sons
Year: 1983
Tongue: English
Weight: 411 KB
Volume: 18
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170180207

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