✦ LIBER ✦
Comparative characterization of boron-implanted silicon after pulse laser annealing along single traces by SEM (SE, EBIC) and TEM studies
✍ Scribed by H. Johansen; Dr. H. Bartsch; Prof. Dr. J. Heydenreich; Dr. B. Lämmel
- Publisher
- John Wiley and Sons
- Year
- 1985
- Tongue
- English
- Weight
- 777 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0232-1300
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