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X-ray absorption study of tantalum oxide films on silicon

✍ Scribed by G.G. Long; A.G. Revesz; M. Kuriyama


Book ID
118333239
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
374 KB
Volume
70
Category
Article
ISSN
0022-3093

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X-ray absorption spectra obtained by total electron yield (TEY) at the Si absorption K-edge have been measured to have chemical and structural information about Si nanocrystals (Si-nc) produced by plasma-enhanced chemical vapour deposition (PECVD). The TEY technique has been employed to investigate