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WP-B4 pH ISFET's using Al2O3, Si3N4, and SiO2gate thin films

✍ Scribed by Matsuo, T.; Esashi, M.; Abe, H.

Book ID: 114593267
Publisher: IEEE
Year: 1979
Tongue: English
Weight: 306 KB
Volume: 26
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1979.19780

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